diff --git a/go.mod b/go.mod
index 6fe5ee5198a0..08a771f0ff4c 100644
--- a/go.mod
+++ b/go.mod
@@ -69,7 +69,7 @@ require (
 	github.com/sirupsen/logrus v1.9.3
 	github.com/spdx/tools-golang v0.5.3
 	github.com/stretchr/testify v1.9.0
-	github.com/tonistiigi/fsutil v0.0.0-20241003195857-3f140a1299b0
+	github.com/tonistiigi/fsutil v0.0.0-20241028165955-397af5306b5c
 	github.com/tonistiigi/go-actions-cache v0.0.0-20240327122527-58651d5e11d6
 	github.com/tonistiigi/go-archvariant v1.0.0
 	github.com/tonistiigi/go-csvvalue v0.0.0-20240710180619-ddb21b71c0b4
diff --git a/go.sum b/go.sum
index da5a84c23519..a74a758d5e76 100644
--- a/go.sum
+++ b/go.sum
@@ -383,8 +383,8 @@ github.com/stretchr/testify v1.9.0 h1:HtqpIVDClZ4nwg75+f6Lvsy/wHu+3BoSGCbBAcpTsT
 github.com/stretchr/testify v1.9.0/go.mod h1:r2ic/lqez/lEtzL7wO/rwa5dbSLXVDPFyf8C91i36aY=
 github.com/tonistiigi/dchapes-mode v0.0.0-20241001053921-ca0759fec205 h1:eUk79E1w8yMtXeHSzjKorxuC8qJOnyXQnLaJehxpJaI=
 github.com/tonistiigi/dchapes-mode v0.0.0-20241001053921-ca0759fec205/go.mod h1:3Iuxbr0P7D3zUzBMAZB+ois3h/et0shEz0qApgHYGpY=
-github.com/tonistiigi/fsutil v0.0.0-20241003195857-3f140a1299b0 h1:H9++AiQUqjwrOMA/DOpWhxWp3JLyyT+MN4sRPbMmwoY=
-github.com/tonistiigi/fsutil v0.0.0-20241003195857-3f140a1299b0/go.mod h1:Dl/9oEjK7IqnjAm21Okx/XIxUCFJzvh+XdVHUlBwXTw=
+github.com/tonistiigi/fsutil v0.0.0-20241028165955-397af5306b5c h1:bQLsfX+uEPZUjyR2qmoJs5F8Z57bPVmF3IsUf22Xo9Y=
+github.com/tonistiigi/fsutil v0.0.0-20241028165955-397af5306b5c/go.mod h1:Dl/9oEjK7IqnjAm21Okx/XIxUCFJzvh+XdVHUlBwXTw=
 github.com/tonistiigi/go-actions-cache v0.0.0-20240327122527-58651d5e11d6 h1:XFG/Wmm5dFYoqUiVChLumRjRzJm0P9k/qDMhxLqdupU=
 github.com/tonistiigi/go-actions-cache v0.0.0-20240327122527-58651d5e11d6/go.mod h1:anhKd3mnC1shAbQj1Q4IJ+w6xqezxnyDYlx/yKa7IXM=
 github.com/tonistiigi/go-archvariant v1.0.0 h1:5LC1eDWiBNflnTF1prCiX09yfNHIxDC/aukdhCdTyb0=
diff --git a/solver/llbsolver/file/backend.go b/solver/llbsolver/file/backend.go
index 2c529a43a22d..1d4abb36aa84 100644
--- a/solver/llbsolver/file/backend.go
+++ b/solver/llbsolver/file/backend.go
@@ -46,7 +46,7 @@ func mkdir(d string, action *pb.FileActionMkDir, user *copy.User, idmap *idtools
 	}
 
 	if action.MakeParents {
-		if err := copy.MkdirAll(p, os.FileMode(action.Mode)&0777, ch, timestampToTime(action.Timestamp)); err != nil {
+		if _, err := copy.MkdirAll(p, os.FileMode(action.Mode)&0777, ch, timestampToTime(action.Timestamp)); err != nil {
 			return err
 		}
 	} else {
diff --git a/solver/llbsolver/file/unpack.go b/solver/llbsolver/file/unpack.go
index 59275b6e2dba..ff167e324de0 100644
--- a/solver/llbsolver/file/unpack.go
+++ b/solver/llbsolver/file/unpack.go
@@ -25,7 +25,7 @@ func unpack(srcRoot string, src string, destRoot string, dest string, ch copy.Ch
 	if err != nil {
 		return false, err
 	}
-	if err := copy.MkdirAll(dest, 0755, ch, tm); err != nil {
+	if _, err := copy.MkdirAll(dest, 0755, ch, tm); err != nil {
 		return false, err
 	}
 
diff --git a/vendor/github.com/tonistiigi/fsutil/copy/copy.go b/vendor/github.com/tonistiigi/fsutil/copy/copy.go
index c2b1ab97d080..f24e77f88417 100644
--- a/vendor/github.com/tonistiigi/fsutil/copy/copy.go
+++ b/vendor/github.com/tonistiigi/fsutil/copy/copy.go
@@ -6,6 +6,7 @@ import (
 	"path"
 	"path/filepath"
 	"runtime"
+	"slices"
 	"strings"
 	"sync"
 	"time"
@@ -79,8 +80,10 @@ func Copy(ctx context.Context, srcRoot, src, dstRoot, dst string, opts ...Opt) e
 		if err != nil {
 			return err
 		}
-		if err := MkdirAll(ensureDstPath, 0755, ci.Chown, ci.Utime); err != nil {
+		if createdDirs, err := MkdirAll(ensureDstPath, 0755, ci.Chown, ci.Utime); err != nil {
 			return err
+		} else {
+			defer fixCreatedParentDirs(createdDirs, ci.Utime)
 		}
 	}
 
@@ -120,10 +123,11 @@ func Copy(ctx context.Context, srcRoot, src, dstRoot, dst string, opts ...Opt) e
 		if err != nil {
 			return err
 		}
-		dst, err := c.prepareTargetDir(srcFollowed, src, dst, ci.CopyDirContents)
+		dst, createdDirs, err := c.prepareTargetDir(srcFollowed, src, dst, ci.CopyDirContents)
 		if err != nil {
 			return err
 		}
+		defer fixCreatedParentDirs(createdDirs, ci.Utime)
 		if err := c.copy(ctx, srcFollowed, "", dst, false, patternmatcher.MatchInfo{}, patternmatcher.MatchInfo{}); err != nil {
 			return err
 		}
@@ -132,16 +136,16 @@ func Copy(ctx context.Context, srcRoot, src, dstRoot, dst string, opts ...Opt) e
 	return nil
 }
 
-func (c *copier) prepareTargetDir(srcFollowed, src, destPath string, copyDirContents bool) (string, error) {
+func (c *copier) prepareTargetDir(srcFollowed, src, destPath string, copyDirContents bool) (string, []string, error) {
 	fiSrc, err := os.Lstat(srcFollowed)
 	if err != nil {
-		return "", err
+		return "", nil, err
 	}
 
 	fiDest, err := os.Stat(destPath)
 	if err != nil {
 		if !os.IsNotExist(err) {
-			return "", errors.Wrap(err, "failed to lstat destination path")
+			return "", nil, errors.Wrap(err, "failed to lstat destination path")
 		}
 	}
 
@@ -154,11 +158,14 @@ func (c *copier) prepareTargetDir(srcFollowed, src, destPath string, copyDirCont
 	if copyDirContents && fiSrc.IsDir() && fiDest == nil {
 		target = destPath
 	}
-	if err := MkdirAll(target, 0755, c.chown, c.utime); err != nil {
-		return "", err
+	var createdDirs []string
+	if dirs, err := MkdirAll(target, 0755, c.chown, c.utime); err != nil {
+		return "", nil, err
+	} else {
+		createdDirs = dirs
 	}
 
-	return destPath, nil
+	return destPath, createdDirs, nil
 }
 
 type User struct {
@@ -689,3 +696,15 @@ func rel(basepath, targpath string) (string, error) {
 	}
 	return filepath.Rel(basepath, targpath)
 }
+
+func fixCreatedParentDirs(dirs []string, tm *time.Time) error {
+	slices.Reverse(dirs)
+	for _, d := range dirs {
+		if tm != nil {
+			if err := Utimes(d, tm); err != nil {
+				return err
+			}
+		}
+	}
+	return nil
+}
diff --git a/vendor/github.com/tonistiigi/fsutil/copy/mkdir.go b/vendor/github.com/tonistiigi/fsutil/copy/mkdir.go
index 9553c08be307..b19c2c61370d 100644
--- a/vendor/github.com/tonistiigi/fsutil/copy/mkdir.go
+++ b/vendor/github.com/tonistiigi/fsutil/copy/mkdir.go
@@ -7,14 +7,14 @@ import (
 )
 
 // MkdirAll is forked os.MkdirAll
-func MkdirAll(path string, perm os.FileMode, user Chowner, tm *time.Time) error {
+func MkdirAll(path string, perm os.FileMode, user Chowner, tm *time.Time) ([]string, error) {
 	// Fast path: if we can tell whether path is a directory or file, stop with success or error.
 	dir, err := os.Stat(path)
 	if err == nil {
 		if dir.IsDir() {
-			return nil
+			return nil, nil
 		}
-		return &os.PathError{Op: "mkdir", Path: path, Err: syscall.ENOTDIR}
+		return nil, &os.PathError{Op: "mkdir", Path: path, Err: syscall.ENOTDIR}
 	}
 
 	// Slow path: make sure parent exists and then call Mkdir for path.
@@ -28,17 +28,19 @@ func MkdirAll(path string, perm os.FileMode, user Chowner, tm *time.Time) error
 		j--
 	}
 
+	var createdDirs []string
+
 	if j > 1 {
 		// Create parent.
-		err = MkdirAll(fixRootDirectory(path[:j-1]), perm, user, tm)
+		createdDirs, err = MkdirAll(fixRootDirectory(path[:j-1]), perm, user, tm)
 		if err != nil {
-			return err
+			return nil, err
 		}
 	}
 
 	dir, err1 := os.Lstat(path)
 	if err1 == nil && dir.IsDir() {
-		return nil
+		return createdDirs, nil
 	}
 
 	// Parent now exists; invoke Mkdir and use its result.
@@ -48,18 +50,19 @@ func MkdirAll(path string, perm os.FileMode, user Chowner, tm *time.Time) error
 		// double-checking that directory doesn't exist.
 		dir, err1 := os.Lstat(path)
 		if err1 == nil && dir.IsDir() {
-			return nil
+			return createdDirs, nil
 		}
-		return err
+		return nil, err
 	}
+	createdDirs = append(createdDirs, path)
 
 	if err := Chown(path, nil, user); err != nil {
-		return err
+		return nil, err
 	}
 
 	if err := Utimes(path, tm); err != nil {
-		return err
+		return nil, err
 	}
 
-	return nil
+	return createdDirs, nil
 }
diff --git a/vendor/modules.txt b/vendor/modules.txt
index 63283fa967d0..7316cbdd48ca 100644
--- a/vendor/modules.txt
+++ b/vendor/modules.txt
@@ -752,7 +752,7 @@ github.com/stretchr/testify/require
 # github.com/tonistiigi/dchapes-mode v0.0.0-20241001053921-ca0759fec205
 ## explicit; go 1.21
 github.com/tonistiigi/dchapes-mode
-# github.com/tonistiigi/fsutil v0.0.0-20241003195857-3f140a1299b0
+# github.com/tonistiigi/fsutil v0.0.0-20241028165955-397af5306b5c
 ## explicit; go 1.21
 github.com/tonistiigi/fsutil
 github.com/tonistiigi/fsutil/copy