BOD-sensor Pressure sensor beam-on-diaphragm silicon sensor, laser-fabricated & anisotropic etched pressure sensor, variable Membrandicken unter Druckbelastung Further information https://tfconsult.com/monolithic-bod-structure/ https://link.springer.com/article/10.1007/BF01371494 Patent https://tfconsult.com/mems-patent/ https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19940901&DB=EPODOC&locale=en_EP&CC=DE&NR=4332653C1&KC=C1&ND=4