diff --git a/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/queryengine/plan/parser/StatementGenerator.java b/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/queryengine/plan/parser/StatementGenerator.java
index b0385c8e6420..68bef30462fc 100644
--- a/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/queryengine/plan/parser/StatementGenerator.java
+++ b/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/queryengine/plan/parser/StatementGenerator.java
@@ -527,7 +527,7 @@ public static CreateAlignedTimeSeriesStatement createStatement(TSCreateAlignedTi
     final long startTime = System.nanoTime();
     // construct create aligned timeseries statement
     CreateAlignedTimeSeriesStatement statement = new CreateAlignedTimeSeriesStatement();
-    statement.setDevicePath(new PartialPath(req.prefixPath));
+    statement.setDevicePath(DEVICE_PATH_CACHE.getPartialPath(req.prefixPath));
     List<TSDataType> dataTypes = new ArrayList<>();
     for (Integer dataType : req.dataTypes) {
       dataTypes.add(TSDataType.deserialize(dataType.byteValue()));
diff --git a/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/queryengine/plan/planner/plan/node/metedata/write/CreateAlignedTimeSeriesNode.java b/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/queryengine/plan/planner/plan/node/metedata/write/CreateAlignedTimeSeriesNode.java
index 64e70aad1bdb..1fda758e7751 100644
--- a/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/queryengine/plan/planner/plan/node/metedata/write/CreateAlignedTimeSeriesNode.java
+++ b/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/queryengine/plan/planner/plan/node/metedata/write/CreateAlignedTimeSeriesNode.java
@@ -23,6 +23,7 @@
 import org.apache.iotdb.commons.exception.IllegalPathException;
 import org.apache.iotdb.commons.path.PartialPath;
 import org.apache.iotdb.db.queryengine.plan.analyze.IAnalysis;
+import org.apache.iotdb.db.queryengine.plan.analyze.cache.schema.DataNodeDevicePathCache;
 import org.apache.iotdb.db.queryengine.plan.planner.plan.node.PlanNode;
 import org.apache.iotdb.db.queryengine.plan.planner.plan.node.PlanNodeId;
 import org.apache.iotdb.db.queryengine.plan.planner.plan.node.PlanNodeType;
@@ -211,7 +212,7 @@ public static CreateAlignedTimeSeriesNode deserialize(ByteBuffer byteBuffer) {
     byte[] bytes = new byte[length];
     byteBuffer.get(bytes);
     try {
-      devicePath = new PartialPath(new String(bytes));
+      devicePath = DataNodeDevicePathCache.getInstance().getPartialPath(new String(bytes));
     } catch (IllegalPathException e) {
       throw new IllegalArgumentException("Can not deserialize CreateAlignedTimeSeriesNode", e);
     }
diff --git a/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/queryengine/plan/planner/plan/node/write/InsertRowNode.java b/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/queryengine/plan/planner/plan/node/write/InsertRowNode.java
index bda7132fb7bf..57107294f765 100644
--- a/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/queryengine/plan/planner/plan/node/write/InsertRowNode.java
+++ b/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/queryengine/plan/planner/plan/node/write/InsertRowNode.java
@@ -417,7 +417,9 @@ public static InsertRowNode deserialize(ByteBuffer byteBuffer) {
   void subDeserialize(ByteBuffer byteBuffer) {
     time = byteBuffer.getLong();
     try {
-      devicePath = new PartialPath(ReadWriteIOUtils.readString(byteBuffer));
+      devicePath =
+          DataNodeDevicePathCache.getInstance()
+              .getPartialPath(ReadWriteIOUtils.readString(byteBuffer));
     } catch (IllegalPathException e) {
       throw new IllegalArgumentException(DESERIALIZE_ERROR, e);
     }
@@ -741,7 +743,9 @@ protected static InsertRowNode subDeserializeFromWAL(ByteBuffer buffer) {
     InsertRowNode insertNode = new InsertRowNode(new PlanNodeId(""));
     insertNode.setTime(buffer.getLong());
     try {
-      insertNode.setDevicePath(new PartialPath(ReadWriteIOUtils.readString(buffer)));
+      insertNode.setDevicePath(
+          DataNodeDevicePathCache.getInstance()
+              .getPartialPath(ReadWriteIOUtils.readString(buffer)));
     } catch (IllegalPathException e) {
       throw new IllegalArgumentException(DESERIALIZE_ERROR, e);
     }
diff --git a/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/queryengine/plan/planner/plan/node/write/InsertRowsOfOneDeviceNode.java b/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/queryengine/plan/planner/plan/node/write/InsertRowsOfOneDeviceNode.java
index 864880fd7749..0ec16ef69c78 100644
--- a/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/queryengine/plan/planner/plan/node/write/InsertRowsOfOneDeviceNode.java
+++ b/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/queryengine/plan/planner/plan/node/write/InsertRowsOfOneDeviceNode.java
@@ -27,6 +27,7 @@
 import org.apache.iotdb.commons.utils.StatusUtils;
 import org.apache.iotdb.commons.utils.TimePartitionUtils;
 import org.apache.iotdb.db.queryengine.plan.analyze.IAnalysis;
+import org.apache.iotdb.db.queryengine.plan.analyze.cache.schema.DataNodeDevicePathCache;
 import org.apache.iotdb.db.queryengine.plan.planner.plan.node.PlanNode;
 import org.apache.iotdb.db.queryengine.plan.planner.plan.node.PlanNodeId;
 import org.apache.iotdb.db.queryengine.plan.planner.plan.node.PlanNodeType;
@@ -228,7 +229,9 @@ public static InsertRowsOfOneDeviceNode deserialize(ByteBuffer byteBuffer) {
     List<Integer> insertRowNodeIndex = new ArrayList<>();
 
     try {
-      devicePath = new PartialPath(ReadWriteIOUtils.readString(byteBuffer));
+      devicePath =
+          DataNodeDevicePathCache.getInstance()
+              .getPartialPath((ReadWriteIOUtils.readString(byteBuffer)));
     } catch (IllegalPathException e) {
       throw new IllegalArgumentException("Cannot deserialize InsertRowsOfOneDeviceNode", e);
     }
diff --git a/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/queryengine/plan/planner/plan/node/write/InsertTabletNode.java b/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/queryengine/plan/planner/plan/node/write/InsertTabletNode.java
index 6fc61399b353..58f6dd363c73 100644
--- a/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/queryengine/plan/planner/plan/node/write/InsertTabletNode.java
+++ b/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/queryengine/plan/planner/plan/node/write/InsertTabletNode.java
@@ -638,7 +638,9 @@ public static InsertTabletNode deserialize(ByteBuffer byteBuffer) {
 
   public void subDeserialize(ByteBuffer buffer) {
     try {
-      devicePath = new PartialPath(ReadWriteIOUtils.readString(buffer));
+      devicePath =
+          DataNodeDevicePathCache.getInstance()
+              .getPartialPath((ReadWriteIOUtils.readString(buffer)));
     } catch (IllegalPathException e) {
       throw new IllegalArgumentException("Cannot deserialize InsertTabletNode", e);
     }
@@ -929,7 +931,9 @@ public static InsertTabletNode deserializeFromWAL(ByteBuffer buffer) {
   private void subDeserializeFromWAL(ByteBuffer buffer) {
     searchIndex = buffer.getLong();
     try {
-      devicePath = new PartialPath(ReadWriteIOUtils.readString(buffer));
+      devicePath =
+          DataNodeDevicePathCache.getInstance()
+              .getPartialPath((ReadWriteIOUtils.readString(buffer)));
     } catch (IllegalPathException e) {
       throw new IllegalArgumentException("Cannot deserialize InsertTabletNode", e);
     }