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Merge pull request #338 from dwarning/res_r3_model
Res r3 model issue #318
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*####################################################################### | ||
* | ||
* Copyright 2023 IHP PDK Authors | ||
* | ||
* | ||
* Licensed under the Apache License, Version 2.0 (the "License"); | ||
* you may not use this file except in compliance with the License. | ||
* You may obtain a copy of the License at | ||
* | ||
* | ||
* https://www.apache.org/licenses/LICENSE-2.0 | ||
* | ||
* | ||
* Unless required by applicable law or agreed to in writing, software | ||
*distributed under the License is distributed on an "AS IS" BASIS, | ||
* WITHOUT WARRANTIES OR CONDITIONS OF ANY KIND, either express or implied. | ||
* See the License for the specific language governing permissions and | ||
* limitations under the License. | ||
* | ||
*####################################################################### | ||
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.include resistors_parm.lib | ||
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**ptap1 (TIE SUB) | ||
.subckt ptap1 1 2 | ||
.subckt ptap1 1 2 | ||
R1 1 2 R=262.847 | ||
.ends ptap1 | ||
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**ntap1 (TIE WELL) | ||
.subckt ntap1 1 2 | ||
.subckt ntap1 1 2 | ||
R1 1 2 R=262.847 | ||
.ends ntap1 | ||
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* Parasitic R/C models | ||
* aluminum: prozess tol. res_rpara | ||
* aluminum: prozess tol. res_rpara | ||
* value is taken from extraction routine | ||
.subckt Rparasitic 1 2 | ||
.subckt Rparasitic 1 2 | ||
.param R=0 w=0 l=0 TC1=0.00353 TC2=0 | ||
R1 1 2 R=r*res_rpara TC1=TC1 TC2=TC2 | ||
R1 1 2 R=r*res_rpara TC1=TC1 TC2=TC2 | ||
.ends Rparasitic | ||
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.subckt rsil 1 3 | ||
.param w=0.5e-6 l=0.5e-6 b=0 m=1 | ||
.param w=0.5e-6 l=0.5e-6 b=0 m=1 trise=0 sw_et=0 | ||
+postsim=0 | ||
+kappa=1.85 | ||
+ps=0.18e-6 | ||
+weff=w+0.01e-6 | ||
+leff=(b+1)*l+(2/kappa*weff+ps)*b | ||
+res_rzspec=2*rzspec/w | ||
+weff=w+0.01e-6 | ||
+rzspec=4.5e-6 | ||
R1 1 2 res_rsil L=leff W=weff m=m | ||
+rzspec=4.5e-6 | ||
+res_rzspec=2*rzspec/w | ||
+lhead=0.86e-6 | ||
+cax=90e-18 | ||
+cpx=25e-18 | ||
+ax=175e-18*(1-1/(1.5*leff*1e6+1))/cax | ||
+px=115e-18/cpx | ||
+a0=0.5*(leff+lhead)*w-(postsim>0)*w*ax*1e-6 | ||
+a=(a0>0)*a0 | ||
+p0=leff+lhead+w-(postsim>0)*px*1e-6 | ||
+p=(p0>0)*p0 | ||
+rshspec=7 | ||
+rqrc=4.5e-6 | ||
+rz=rzspec/w-(postsim>0)*rqrc/w | ||
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NR1 1 0 2 dt rmod_rsil L=leff W=weff m=m | ||
+a1=a a2=a | ||
+p1=p p2=p | ||
+c1=1 c2=1 | ||
+trise=trise | ||
+sw_et=sw_et | ||
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R2 2 3 R=res_rzspec TC1=3100e-6 TC2=0.3e-6 m=m | ||
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.model rmod_rsil r3_cmc | ||
+rsh=rsh_rsil | ||
+ecrit=1000 | ||
+dfinf=1e-4 | ||
+dp=1000 | ||
+xw=0.01 | ||
+rc=rz | ||
+ca=cax | ||
+cp=cpx | ||
+tc1=3100e-6 | ||
+tc2=0.3e-6 | ||
+tc1rc=3100e-6 | ||
+tc2rc=0.3e-6 | ||
+gth0=1e-12 | ||
+gtha=6e-6 | ||
+gthp=2e-6 | ||
+gthc=1e-12 | ||
+cth0=0 | ||
+cthp=0 | ||
+ctha=594e-15 | ||
+cthc=0 | ||
+kfn=2.812e-12 | ||
+afn=1.607 | ||
+bfn=1.267 | ||
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.ends rsil | ||
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.subckt rhigh 1 3 | ||
.param w=0.5e-6 l=0.96e-6 b=0 m=1 | ||
.subckt rhigh 1 3 | ||
.param w=0.5e-6 l=0.96e-6 b=0 trise=0 m=1 sw_et=0 | ||
+postsim=0 | ||
+kappa=1.85 | ||
+ps=0.18e-6 | ||
+weff=w-0.04e-6 | ||
+leff=(b+1)*l+(2/kappa*weff+ps)*b | ||
+res_rzspec=2*rzspec/w | ||
+weff=w-0.04e-6 | ||
+rzspec=80e-6 | ||
R1 1 2 res_rhigh L=leff W=weff m=m | ||
+lhead=0.86e-6 | ||
+rzspec=80e-6 | ||
+res_rzspec=2*rzspec/w | ||
+cax=90e-18 | ||
+cpx=25e-18 | ||
+ax=175e-18*(1-1/(1.5*leff*1e6+1))/cax | ||
+px=115e-18/cpx | ||
+a0=0.5*(leff+lhead)*w-(postsim>0)*w*ax*1e-6 | ||
+a=(a0>0)*a0 | ||
+p0=leff+lhead+w-(postsim>0)*px*1e-6 | ||
+p=(p0>0)*p0 | ||
+rshspec=1360 | ||
+rqrc=4.5e-6 | ||
+rz=rzspec/w-(postsim>0)*rqrc/w | ||
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NR1 1 0 2 dt rmod_rhigh L=leff W=weff m=m | ||
+a1=a a2=a | ||
+p1=p p2=p | ||
+c1=1 c2=1 | ||
+trise=trise | ||
+sw_et=1 | ||
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R2 2 3 R=res_rzspec TC1=-2300e-6 TC2=2.1e-6 m=m | ||
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.model rmod_rhigh r3_cmc | ||
+rsh=rsh_rhigh | ||
+ecrit=1000 | ||
+dfinf=1e-4 | ||
+dp=1000 | ||
+xw=-0.04 | ||
+rc=rz | ||
+ca=cax | ||
+cp=cpx | ||
+tc1=-2300e-6 | ||
+tc2=2.1e-6 | ||
+tc1rc=-2300e-6 | ||
+tc2rc=2.1e-6 | ||
+gth0=1e-12 | ||
+gtha=6e-6 | ||
+gthp=2e-6 | ||
+gthc=1e-12 | ||
+cth0=0 | ||
+cthp=0 | ||
+ctha=594e-15 | ||
+cthc=0 | ||
+kfn=5.205e-10 | ||
+afn=1.935 | ||
+bfn=0.9086 | ||
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.ends rhigh | ||
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.subckt rppd 1 3 | ||
.param w=0.5e-6 l=0.5e-6 b=0 m=1 | ||
.subckt rppd 1 3 | ||
.param w=0.5e-6 l=0.5e-6 b=0 ps=0.18e-6 trise=0 m=1 sw_et=0 | ||
+postsim=0 | ||
+kappa=1.85 | ||
+ps=0.18e-6 | ||
+weff=w+0.006e-6 | ||
+leff=(b+1)*l+(2/kappa*weff+ps)*b | ||
+lhead=0.86e-6 | ||
+rzspec=35e-6 | ||
+res_rzspec=2*rzspec/w | ||
+weff=w+0.006e-6 | ||
+rzspec=35e-6 | ||
R1 1 2 res_rppd L=leff W=weff m=m | ||
R2 2 3 R=res_rzspec TC1=-950e-6 m=m | ||
+cax=90e-18 | ||
+cpx=25e-18 | ||
+ax=175e-18*(1-1/(1.5*leff*1e6+1))/cax | ||
+px=115e-18/cpx | ||
+a0=0.5*(leff+lhead)*w-(postsim>0)*w*ax*1e-6 | ||
+a=(a0>0)*a0 | ||
+p0=leff+lhead+w-(postsim>0)*px*1e-6 | ||
+p=(p0>0)*p0 | ||
+rqrc=4.5e-6 | ||
+rz=rzspec/w-(postsim>0)*rqrc/w | ||
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NR1 1 0 2 dt res_rppd L=leff W=weff m=m | ||
+a1=a a2=a | ||
+p1=p p2=p | ||
+c1=1 c2=1 | ||
+trise=trise | ||
+sw_et=sw_et | ||
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R2 2 3 R=res_rzspec TC1=-950e-6 m=m | ||
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.model res_rppd r3_cmc | ||
+rsh=rsh_rppd | ||
+ecrit=1000 | ||
+dfinf=1e-4 | ||
+dp=1000 | ||
+xw=0.006 | ||
+rc=rz | ||
+ca=cax | ||
+cp=cpx | ||
+tc1=170e-6 | ||
+tc2=0.4e-6 | ||
+tc1rc=-950e-6 | ||
+gth0=1e-12 | ||
+gtha=6e-6 | ||
+gthp=2e-6 | ||
+gthc=1e-12 | ||
+cth0=0 | ||
+cthp=0 | ||
+ctha=594e-15 | ||
+cthc=0 | ||
+kfn=4.601e-11 | ||
+afn=1.886 | ||
+bfn=0.9963 | ||
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.ends rppd |
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